Sensors-Experts & Associates

Best MEMS books:

• http://www.amazon.com/Microsystem-Design-Stephen-D-Senturia/dp/0792372468 
• Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems by Ville Kaajakari (Hardcover - Mar 17, 2009).
• http://www.amazon.com/Fundamentals-Microfabrication-Marc-J-Madou/dp/0849394511/ref=sr_11_1?ie=UTF8&qid=1253047456&sr=11-1

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Often used MEMS formulae, compiled by Prof. Ville Kaajakari

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White Papers

• Coupled Multi-Physics Modeling of Micro-Machined Electro-Thermo-Mechanical Actuator

• Linear displacement transducer based on GMR effect

• A methodology  and Associated CAD Tools for Support of Concurrent Design of MEMS

• A Technique for Extraction of Macro-Models in System Level Simulation of Inertial Electro-Mechanical Micro-Systems

• Horizontal Bubble Train Apparatus for Heterogeneous Chemistry Studies: Uptake of Gas-Phase Formaldehyde
• dgfdghf Acoustic Losses in the Pure and Cr-Doped B12SiO20 Single Crystals at High Temperatures

• Acoustic Losses in the Pure and Cr-Doped B12SiO20 Single Crystals at High Temperatures

• Acoustic Losses in the Pure and Cr-Doped B12SiO20 Single Crystals at High Temperatures